Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/102391
Title: Error compensation of grating interferometer due to angular error of linear stage
Authors: Zhang, Y. L.
Miao, J. W.
Fan, Kuang-Chao
Cheng, Fang
Keywords: DRNTU::Engineering::Mechanical engineering::Mechatronics
Issue Date: 2012
Source: Fan, K.-C., Zhang, Y. L., Miao, J. W., & Cheng, F. (2012). Error compensation of grating interferometer due to angular error of linear stage. 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp.428-431.
Abstract: Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.
URI: https://hdl.handle.net/10356/102391
http://hdl.handle.net/10220/16510
DOI: 10.1109/AIM.2012.6265886
Rights: © 2012 IEEE
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Conference Papers

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