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Title: Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach
Authors: Liu, Haotian
Zhang, Li
Li, Holden King Ho
Tan, Ooi Kiang
Keywords: Gas Sensor
Metal Oxide (MOX) Sensor
DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2018
Source: Liu, H., Zhang, L., Li, H. K. H., & Tan, O. K. (2018). Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach. Micromachines, 9(11), 557-. doi:10.3390/mi9110557
Series/Report no.: Micromachines
Abstract: The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.
DOI: 10.3390/mi9110557
Rights: © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles
MAE Journal Articles
TL Journal Articles

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