Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/103552
Title: | Microhotplates for metal oxide semiconductor gas sensor applications—towards the CMOS-MEMS monolithic approach | Authors: | Liu, Haotian Zhang, Li Li, Holden King Ho Tan, Ooi Kiang |
Keywords: | Gas Sensor Metal Oxide (MOX) Sensor DRNTU::Engineering::Electrical and electronic engineering |
Issue Date: | 2018 | Source: | Liu, H., Zhang, L., Li, H. K. H., & Tan, O. K. (2018). Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach. Micromachines, 9(11), 557-. doi:10.3390/mi9110557 | Series/Report no.: | Micromachines | Abstract: | The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility. | URI: | https://hdl.handle.net/10356/103552 http://hdl.handle.net/10220/47336 |
DOI: | 10.3390/mi9110557 | Rights: | © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Journal Articles MAE Journal Articles TL Journal Articles |
Files in This Item:
File | Description | Size | Format | |
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Microhotplates for Metal Oxide Semiconductor Gas.pdf | 3.49 MB | Adobe PDF | ![]() View/Open |
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