Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/104906
Title: Applications of higher-order phase shifting algorithms for multiple-wavelength metrology
Authors: Upputuri, Paul Kumar
Pramanik, Manojit
Keywords: Engineering::Chemical engineering
Phase Shifting Interferometry
Multiple-wavelength
Issue Date: 2019
Source: Upputuri, P. K., & Pramanik, M. (2019). Applications of higher-order phase shifting algorithms for multiple-wavelength metrology. Proceedings of SPIE - Quantitative Phase Imaging. doi:10.1117/12.2511942
Abstract: Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm, which requires a phase shifter such as PZT, has been widely used for accurate phase evolution in interferometry. The phase shifter needs to be calibrated at every wavelength if multiple wavelengths are used for measurement, it is a time consuming process. If phase shifter is not calibrated accurately, it can introduce phase shift errors. In this work, we will discuss various phase shifting algorithms, and their tolerance for phase shift error. And the applications of higher-order phased shifting algorithms will be presented. The study is useful for multiple-wavelength and white light interferometry where more than one wavelength is used for optical phase measurements.
URI: https://hdl.handle.net/10356/104906
http://hdl.handle.net/10220/49473
DOI: 10.1117/12.2511942
Rights: © 2019 Society of Photo-optical Instrumentation Engineers (SPIE). All rights reserved. This paper was published in Proceedings of SPIE - Quantitative Phase Imaging and is made available with permission of Society of Photo-optical Instrumentation Engineers (SPIE).
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:SCBE Conference Papers

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