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|Title:||A novel checker-patterned AlN MEMS resonator as gravimetric sensor||Authors:||Lee, Man I.
Park, Mi Kyoung
Tsai, Julius Ming-Lin
|Issue Date:||2012||Source:||Heidari, A., Yoon, Y.-J., Lee, M. I., Khine, L., Park, M. K., & Tsai, J. M. L. (2013). A novel checker-patterned AlN MEMS resonator as gravimetric sensor. Sensors and Actuators A: Physical, 189, 298-306.||Series/Report no.:||Sensors and actuators A: physical||Abstract:||This paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simulations and experimental results. The results show that a 773 MHz resonator has mass sensitivity of 175.42 μm2/ng and detection limit of 18.7 ng/cm2. The developed sensor has an obtained mass sensitivity of 2–3 times higher than that of state-of-the-art mass sensors and provides high potential for developed piezoelectric transducers for mass sensing applications.||URI:||https://hdl.handle.net/10356/106268
|ISSN:||0924-4247||DOI:||10.1016/j.sna.2012.09.027||Fulltext Permission:||none||Fulltext Availability:||No Fulltext|
|Appears in Collections:||MAE Journal Articles|
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