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Title: A novel checker-patterned AlN MEMS resonator as gravimetric sensor
Authors: Lee, Man I.
Heidari, Amir
Yoon, Yong-Jin
Khine, Lynn
Park, Mi Kyoung
Tsai, Julius Ming-Lin
Issue Date: 2012
Source: Heidari, A., Yoon, Y.-J., Lee, M. I., Khine, L., Park, M. K., & Tsai, J. M. L. (2013). A novel checker-patterned AlN MEMS resonator as gravimetric sensor. Sensors and Actuators A: Physical, 189, 298-306.
Series/Report no.: Sensors and actuators A: physical
Abstract: This paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simulations and experimental results. The results show that a 773 MHz resonator has mass sensitivity of 175.42 μm2/ng and detection limit of 18.7 ng/cm2. The developed sensor has an obtained mass sensitivity of 2–3 times higher than that of state-of-the-art mass sensors and provides high potential for developed piezoelectric transducers for mass sensing applications.
ISSN: 0924-4247
DOI: 10.1016/j.sna.2012.09.027
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Journal Articles

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