Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/106899
Title: White light interferometer with color CCD for 3D-surface profiling of microsystems
Authors: Upputuri, Paul Kumar
Pramanik, Manojit
Nandigana, Krishna Mohan
Kothiyal, Mahendra Prasad
Keywords: DRNTU::Science::Chemistry::Physical chemistry
Issue Date: 2015
Source: Upputuri, P. K., Pramanik, M., Nandigana, K. M., & Kothiyal, M. P. (2015). White light interferometer with color CCD for 3D-surface profiling of microsystems. Proceeding SPIE, International Conference on Experimental Mechanics 2014, 9302.
Abstract: White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry. In this paper, we combine white light interferometer with a single-chip color CCD camera which makes the measurement faster, simpler, and cost-effective. The red-bluegreen (RGB) color interferogram stored in a computer is then decomposed into its individual components and corresponding phase maps for red, green, and blue components are calculated independently. The usefulness of the technique is demonstrated on reflective micro-scale-samples.
URI: https://hdl.handle.net/10356/106899
http://hdl.handle.net/10220/25224
DOI: 10.1117/12.2081117
Rights: © 2015 SPIE. This is the author created version of a work that has been peer reviewed and accepted for publication by Proceeding SPIE, International Conference on Experimental Mechanics 2014, SPIE. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1117/12.2081117].
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:SCBE Conference Papers

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