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https://hdl.handle.net/10356/13398| Title: | Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer | Authors: | Su, Cheng. | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems | Issue Date: | 1999 | Abstract: | Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance. | URI: | http://hdl.handle.net/10356/13398 | Schools: | School of Mechanical and Production Engineering | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| SU_CHENG_1999.pdf Restricted Access | 15.35 MB | Adobe PDF | View/Open |
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