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Title: Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
Authors: Su, Cheng.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Issue Date: 1999
Abstract: Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance.
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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