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dc.contributor.authorZhang, Zecenen_US
dc.contributor.authorNg, Geok Ingen_US
dc.contributor.authorHu, Tingen_US
dc.contributor.authorQiu, Haodongen_US
dc.contributor.authorGuo, Xinen_US
dc.contributor.authorWang, Wanjunen_US
dc.contributor.authorMohamed Saïd Rouifeden_US
dc.contributor.authorLiu, Chongyangen_US
dc.contributor.authorSia, Jiaxuen_US
dc.contributor.authorZhou, Jinen_US
dc.contributor.authorWang, Hongen_US
dc.identifier.citationZhang, Z., Ng, G. I., Hu, T., Qiu, H., Guo, X., Wang, W., . . . Wang, H. (2018). Suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding for mid-infrared sensing applications. ITM Web of Conferences, 17, 02005-. doi:10.1051/itmconf/20181702005en_US
dc.description.abstractA one-time etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on commercial 340 nm-thick-top-silicon silicon-on-insulator (SOI) platform for mid-infrared (MIR) bio-chemical sensing applications. The suspended structure can offer a larger exposed area of waveguides with the testing chemicals as well as a decent sensitivity. And the one-time etching process also eases the fabrication. The suspended waveguide is optimized with a balance between propagation loss and the sensitivity. The suspended microracetrack resonator is experimentally measured at 2 μm wavelength and well fitted with an extinction ratio (ER) of 12.3 dB and a full-width-at-half-maximum (FWHM) of 0.12 nm, which corresponds to a quality factor (Q factor) of 16600. With the equivalent refractive index method and a specially developed numerical model, the expected sensitivities of fundamental TE and TM mode were calculated as 58 nm/RIU and 303 nm/RIU respectively. This one-time etching suspended microracetrack resonator shows great potential in MIR optical bio-chemical sensing applications.en_US
dc.relation.ispartofITM Web of Conferencesen_US
dc.rights© 2018 The Authors. Published by EDP Sciences. This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (
dc.subjectEngineering::Electrical and electronic engineeringen_US
dc.titleSuspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding for mid-infrared sensing applicationsen_US
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.contributor.organizationNOVITAS, Nanoelectronics Centre of Excellenceen_US
dc.description.versionPublished versionen_US
dc.subject.keywordsMid-infrared Sensingen_US
dc.subject.keywordsMetamaterial Claddingen_US
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