Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/137622
Title: Suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding for mid-infrared sensing applications
Authors: Zhang, Zecen
Ng, Geok Ing
Hu, Ting
Qiu, Haodong
Guo, Xin
Wang, Wanjun
Mohamed Saïd Rouifed
Liu, Chongyang
Sia, Jiaxu
Zhou, Jin
Wang, Hong
Keywords: Engineering::Electrical and electronic engineering
Issue Date: 2018
Source: Zhang, Z., Ng, G. I., Hu, T., Qiu, H., Guo, X., Wang, W., . . . Wang, H. (2018). Suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding for mid-infrared sensing applications. ITM Web of Conferences, 17, 02005-. doi:10.1051/itmconf/20181702005
Journal: ITM Web of Conferences
Abstract: A one-time etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on commercial 340 nm-thick-top-silicon silicon-on-insulator (SOI) platform for mid-infrared (MIR) bio-chemical sensing applications. The suspended structure can offer a larger exposed area of waveguides with the testing chemicals as well as a decent sensitivity. And the one-time etching process also eases the fabrication. The suspended waveguide is optimized with a balance between propagation loss and the sensitivity. The suspended microracetrack resonator is experimentally measured at 2 μm wavelength and well fitted with an extinction ratio (ER) of 12.3 dB and a full-width-at-half-maximum (FWHM) of 0.12 nm, which corresponds to a quality factor (Q factor) of 16600. With the equivalent refractive index method and a specially developed numerical model, the expected sensitivities of fundamental TE and TM mode were calculated as 58 nm/RIU and 303 nm/RIU respectively. This one-time etching suspended microracetrack resonator shows great potential in MIR optical bio-chemical sensing applications.
URI: https://hdl.handle.net/10356/137622
ISSN: 2271-2097
DOI: 10.1051/itmconf/20181702005
Schools: School of Electrical and Electronic Engineering 
Organisations: NOVITAS, Nanoelectronics Centre of Excellence
Rights: © 2018 The Authors. Published by EDP Sciences. This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles

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