Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/138811
Title: High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications
Authors: Vu, Tuan Duc
Liu, Shiyu
Zeng, Xianting
Li, Chuanchang
Long, Yi
Keywords: Engineering::Materials
Issue Date: 2019
Source: Vu, T. D., Liu, S., Zeng, X., Li, C., & Long, Y. (2020). High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications. Ceramics International, 46(6), 8145-8153. doi:10.1016/j.ceramint.2019.12.042
Journal: Ceramics International 
Abstract: Vanadium dioxide (VO2) is one of the most promising thermochromic materials for smart windows application because of its ability to modulate infrared radiation (IR) by reversibly transform from semiconductor-like monoclinic VO2 (M) to metallic rutile VO2 (R) above its transition temperature (τc). Despite the promising potential, VO2 has not been commercialized due to various technical difficulties which hinder its feasibilities outside of laboratories environment. One of those is the efficiency of high quality VO2 thin-film fabrication process. In this paper, we presented a method utilizing high-power impulse magnetron sputtering (HiPIMS) to deposit VO2 thin-film on a commercial material such as soda-lime glass substrate with a respectable deposition rate of 5.7 nm/min. The VO2 deposited on soda-lime glass exhibits excellent crystallinity and thermochromic properties (highest luminous transmission Tlum ≈ 30.4%, and solar modulation ΔTsol ≈ 12%) in comparison with similarly prepared VO2 on high temperature glass and quartz substrates. The high crystallinity rendered by short deposition duration and high ionization in HiPIMS process opens opportunities to apply high quality VO2 thin-film onto a variety of substrate more efficiently.
URI: https://hdl.handle.net/10356/138811
ISSN: 0272-8842
DOI: 10.1016/j.ceramint.2019.12.042
DOI (Related Dataset): https://doi.org/10.21979/N9/VFQG8Q
Rights: © 2019 Elsevier Ltd and Techna Group S.r.l. All rights reserved. This paper was published in Ceramics International and is made available with permission of Elsevier Ltd and Techna Group S.r.l.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MSE Journal Articles
SIMTech Journal Articles

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