Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/140386
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dc.contributor.authorLiu, Binghaien_US
dc.contributor.authorHua, Younanen_US
dc.contributor.authorDong, Zhilien_US
dc.contributor.authorTan, Pik Keeen_US
dc.contributor.authorZhao, Yuzheen_US
dc.contributor.authorMo, Zhiqiangen_US
dc.contributor.authorLam, Jeffreyen_US
dc.contributor.authorMai, Zhihongen_US
dc.date.accessioned2020-05-28T08:37:53Z-
dc.date.available2020-05-28T08:37:53Z-
dc.date.issued2018-
dc.identifier.citationLiu, B., Hua, Y., Dong, Z., Tan, P. K., Zhao, Y., Mo, Z., . . . Mai, Z. (2018). The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM. Proceedings of the 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). doi:10.1109/IPFA.2018.8452485en_US
dc.identifier.isbn978-1-5386-4930-5-
dc.identifier.issn1946-1550-
dc.identifier.urihttps://hdl.handle.net/10356/140386-
dc.description.abstractThe paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk/ULK, silicon nitride and CoFeB thin film materials in semiconductor and MRAM devices. The details included radiation induced microstructure changes., material diffusion and phase transformation. The underlying mechanism was also briefly discussed for electron radiation damage to different materials.en_US
dc.language.isoenen_US
dc.rights© 2018 IEEE. All rights reserved.en_US
dc.subjectEngineering::Materialsen_US
dc.titleThe overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEMen_US
dc.typeConference Paperen
dc.contributor.schoolSchool of Materials Science & Engineeringen_US
dc.contributor.conference2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)en_US
dc.identifier.doi10.1109/IPFA.2018.8452485-
dc.subject.keywordsElectron Beam Sensitiveen_US
dc.subject.keywordsElectron Beam Radiationen_US
dc.citation.conferencelocationSingapore, Singaporeen_US
item.grantfulltextnone-
item.fulltextNo Fulltext-
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