Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/141780
Title: | An application of incremental scheduling to a cluster photolithography tool | Authors: | Ware, Simon Su, Rong |
Keywords: | Engineering::Electrical and electronic engineering | Issue Date: | 2017 | Source: | Ware, S., & Su, R. (2017). An application of incremental scheduling to a cluster photolithography tool. IFAC-PapersOnLine, 50(1), 1114-1120. doi:10.1016/j.ifacol.2017.08.393 | Abstract: | Optimization is an important area of research. As many optimization problems are NP-Hard it is important to have a wide selection of heuristic approaches to choose from when solving problems. Prioritized planning is a technique traditionally used to solve the multi-robot path planning problem. In this paper we investigate how incremental scheduling, a technique based upon prioritized planning can be applied to scheduling wafer processing in a cluster tool. For our test case our approach is shown to be capable of finding a plan of equal quality to other scheduling approaches and thus suggests our method could be of potential use in other manufacturing/material handling applications. | URI: | https://hdl.handle.net/10356/141780 | ISSN: | 2405-8963 | Rights: | © 2017 IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. This is an open-access article distributed under the terms of the Creative Commons Attribution License. | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Conference Papers |
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An application of incremental scheduling to a cluster photolithography tool.pdf | 488.02 kB | Adobe PDF | View/Open |
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