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Title: Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets
Authors: Yang, Fajun
Wu, Naiqi
Qiao, Yan
Su, Rong
Keywords: Engineering::Electrical and electronic engineering
Issue Date: 2017
Source: Yang, F., Wu, N., Qiao, Y., & Su, R. (2018). Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets. IEEE/CAA Journal of Automatica Sinica, 5(1), 270-280. doi:10.1109/jas.2017.7510772
Journal: IEEE/CAA Journal of Automatica Sinica
Abstract: A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots' waiting time. Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.
ISSN: 2329-9266
DOI: 10.1109/jas.2017.7510772
Rights: © 2018 The Chinese Association of Automation (published by IEEE). This is an open-access article distributed under the terms of the Creative Commons Attribution License.
Fulltext Permission: open
Fulltext Availability: With Fulltext
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