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Title: Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
Authors: Cheng, Shi-De
Zhou, Yan
Kam, Chan Hin
Lam, Yee Loy
Chan, Yuen-Chuen
Que, Wenxiu
Gan, Woon Siong
Keywords: Engineering::Electrical and electronic engineering
Issue Date: 2001
Source: Cheng, S.-D., Zhou, Y., Kam, C. H., Lam, Y. L., Chan, Y.-C., Que, W., & Gan W. S. (2001). Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications. Fiber and Integrated Optics, 20(1), 45-52. doi:10.1080/01468030120669
Journal: Fiber and Integrated Optics
Abstract: Thin films of lithium tantalate have been derived on SiO2/Si substrate by sol-gel method. The sol is prepared by mixing LiOC2H5 and Ta(OC2H5)5. The film is deposited by spin- coating and annealing at 600°C. The film is characterized by means of X-ray diffraction, atomic force microscopy, and the m-line technique. The experimental results show that the film has crystallized into the pure trigonal phase and it is microsopically continuous and uniform. The crystalline size ranges from about 33nm to 96nm. The refractive index of the film is measured to be 1.84 at the wavelength of 633nm and the film is found to support several guiding modes at this wavelength. © 2001 Taylor & Francis.
ISSN: 0146-8030
DOI: 10.1080/01468030120669
Rights: © 2001 Taylor & Francis. All rights reserved.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:EEE Journal Articles

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