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Title: Optomems device development for DWDM system applications
Authors: Liu, Ai Qun.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Issue Date: 2005
Abstract: The rapid development of microelectromechanical systems (MEMS) technology has paved the way for engineering innovations and physical discoveries of optical devices. In this project, new optical MEMS devices that could play key roles in the dense wavelength division multiplexing (DWDM) systems have been developed, including optical switches and tunable lasers. First, a novel micromachined actuator and a deep reactive ion etching (DRIE) process have been investigated.
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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