Study of transition metal doping in transparent conductive oxides using magnetron sputtering

Abstract

In this report, the fabrication of transition metal doped transparent conductive oxide (TCOs) thin films will be explored. The importance and viability of TCOs will be discussed, followed by the fabrication process and the characterization results. The TCO in this report is the Molybdenum oxide doped zinc oxide deposited using magnetron sputtering. The 2wt% MoO3 doping zinc oxide thin films are deposited on glass substrates at varying pressures, varying power at room temperature and high temperature. The optical properties, surface morphology and electrical properties of the TCOs were investigated using spectrophotometry, atomic force microscopy and Hall Effect.