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Title: Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy
Authors: Muttikulangara, Sanathanan Swaminathan
Baranski, Maciej
Rehman, Shakil
Hu, Liangxing
Miao, Jianmin
Keywords: Engineering::Mechanical engineering
Issue Date: 2018
Source: Muttikulangara, S. S., Baranski, M., Rehman, S., Hu, L., & Miao, J. (2018). Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy. Proceedings of 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), 696-699. doi:10.1109/MEMSYS.2018.8346650
Abstract: This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion which is difficult to attain with classical actuation like comb-drive design that depends on the structural resonant frequency. The micro-motor design is based on flexure mechanism to avoid frictional effects and getting the maximum angular stroke. The diffraction grating is fabricated separately by replication technique on a photosensitive material, SU-8 which becomes hard when it is cured. Finally, the replicated diffraction grating is bonded to the micro-actuator using UV-curable glue.
ISBN: 978-1-5386-4783-7
DOI: 10.1109/MEMSYS.2018.8346650
Rights: © 2018 IEEE. All rights reserved.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Conference Papers

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