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dc.contributor.authorYang, Fajunen_US
dc.contributor.authorQiao, Yanen_US
dc.contributor.authorGao, Kaizhouen_US
dc.contributor.authorWu, Naiqien_US
dc.contributor.authorZhu, Yutingen_US
dc.contributor.authorWare, Simon Ianen_US
dc.contributor.authorSu, Rongen_US
dc.identifier.citationYang, F., Qiao, Y., Gao, K., Wu, N., Zhu, Y., Ware, S. I., & Su, R. (2018). Efficient approach to scheduling of transient processes for time-constrained single-arm cluster tools with parallel chambers. IEEE Transactions on Systems, Man, and Cybernetics: Systems, 50(10), 3646-3657. doi:10.1109/tsmc.2018.2852724en_US
dc.description.abstractIn wafer manufacturing, extensive research on the operations of cluster tools under the steady state has been reported. However, with the shrinking down of wafer lot size, such tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes, including start-up and close-down ones. Also, wafer residency time constraint is critical for many wafer fabrication processes. To cope with the transient scheduling problem of time-constrained single-arm cluster tools with parallel chambers, based on a generalized backward strategy, this paper first builds timed Petri net models for these two transient processes. Then, two linear programs are derived for the first time to search a feasible schedule with a minimal makespan. Two industrial examples are given to demonstrate the effectiveness of the obtained results at last.en_US
dc.relation.ispartofIEEE Transactions on Systems, Man, and Cybernetics: Systemsen_US
dc.rights© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at:
dc.subjectEngineering::Electrical and electronic engineeringen_US
dc.titleEfficient approach to scheduling of transient processes for time-constrained single-arm cluster tools with parallel chambersen_US
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.description.versionAccepted versionen_US
dc.subject.keywordsCluster Toolsen_US
dc.subject.keywordsPetri Net (PN)en_US
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