RF MEMs devices development for telecommunications

Abstract

Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard CMOS techniques for high-volume integrated semiconductor circuits. RF MEMS switches are characterized by their low insertion loss, high return loss and isolation, large bandwidth, good linearity, negligible power consumption, low actuation voltage. In this project, new RF MEMS switches that could play key roles in MEMS have been developed.