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Title: Adaptive abstraction-level conversion framework for accelerated discrete-event simulation in smart semiconductor manufacturing
Authors: Seok, Moon Gi
Cai, Wentong
Sarjoughian, Hessam S.
Park, Daejin
Keywords: Engineering::Electrical and electronic engineering
Issue Date: 2020
Source: Seok, M. G., Cai, W., Sarjoughian, H. S., & Park, D. (2020). Adaptive abstraction-level conversion framework for accelerated discrete-event simulation in smart semiconductor manufacturing. IEEE Access, 8, 165247-165262. doi:10.1109/ACCESS.2020.3022275
Project: A19C1a0018 
Journal: IEEE Access 
Abstract: Speeding up the simulation of discrete-event wafer-fabrication models is essential for fast decision-making to handle unexpected events in smart semiconductor manufacturing because decision-parameter optimization requires repeated simulation execution based on the current manufacturing situation. In this paper, we present a runtime abstraction-level conversion approach for discrete-event fab models to gain simulation speedup. During the simulation, if the fab's machine group model reaches a steady state, then the proposed method attempts to substitute this group model with a mean-delay model (MDM) as a high abstraction level model. The MDM abstracts detailed event-driven operations of subcomponents in the group into an average delay based on the queuing modeling, which can guarantee acceptable accuracy in predicting the performance of steady-state queuing systems. To detect the steadiness, the proposed abstraction-level converter (ALC) observes the queuing parameters of low-level groups to identify the statistical convergence of each group's work-in-progress (WIP) level. When a group's WIP level is converged, the output-to-input couplings between the models are revised to change a wafer-lot process flow from the low-level group to a MDM. When the ALC detects lot-arrival changes or any wafer processing status change (e.g., a machine-down), the high-level model is switched back to its corresponding low-level group model. During high-to-low level conversion, the ALC generates dummy wafer-lot events to re-initialize the machine states. The proposed method was applied to various case studies of wafer-fab systems and achieved simulation speedups up to about 4 times with 0.6 to 8.3% accuracy degradations.
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2020.3022275
Schools: School of Computer Science and Engineering 
Rights: © 2020 IEEE. This journal is 100% open access, which means that all content is freely available without charge to users or their institutions. All articles accepted after 12 June 2019 are published under a CC BY 4.0 license, and the author retains copyright. Users are allowed to read, download, copy, distribute, print, search, or link to the full texts of the articles, or use them for any other lawful purpose, as long as proper attribution is given.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:SCSE Journal Articles

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