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https://hdl.handle.net/10356/146291
Title: | Development of a CMOs-compatible carbon nanotube array transfer method | Authors: | Siah, Chun Fei Lum, Lucas Yu Xiang Wang, Jianxiong Goh, Simon Chun Kiat Tan, Chong Wei Hu, Liangxing Coquet, Philippe Li, Hong Tan, Chuan Seng Tay, Beng Kang |
Keywords: | Engineering | Issue Date: | 2021 | Source: | Siah, C. F., Lum, L. Y. X., Wang, J., Goh, S. C. K., Tan, C. W., Hu, L., ... Tay, B. K. (2021). Development of a CMOs-compatible carbon nanotube array transfer method. Micromachines, 12(1). doi:10.3390/mi12010095 | Journal: | Micromachines | Abstract: | Carbon nanotubes (CNTs) have, over the years, been used in research as a promising material in electronics as a thermal interface material and as interconnects amongst other applications. However, there exist several issues preventing the widespread integration of CNTs onto device applications, e.g., high growth temperature and interfacial resistance. To overcome these issues, a complementary metal oxide semiconductor (CMOS)-compatible CNT array transfer method that electrically connects the CNT arrays to target device substrates was developed. The method separates the CNT growth and preparation steps from the target substrate. Utilizing an alignment tool with the capabilities of thermocompression enables a highly accurate transfer of CNT arrays onto designated areas with desired patterns. With this transfer process as a starting point, improvement pointers are also discussed in this paper to further improve the quality of the transferred CNTs. | URI: | https://hdl.handle.net/10356/146291 | ISSN: | 2072-666X | DOI: | 10.3390/mi12010095 | Schools: | School of Electrical and Electronic Engineering School of Mechanical and Aerospace Engineering |
Organisations: | Institut d’Electronique, de Micro Electronique et de Nanotechnologie | Research Centres: | CNRS International NTU THALES Research Alliances | Rights: | © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Journal Articles |
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Development of a CMOs-compatible carbon nanotube array transfer method.pdf | 1.75 MB | Adobe PDF | View/Open |
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