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Title: Laser-induced hierarchically-structured materials from block copolymer self-assembly
Authors: Tan, Kwan Wee 
Keywords: Engineering::Materials::Nanostructured materials
Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2019
Source: Tan, K. W. (2019). Laser-induced hierarchically-structured materials from block copolymer self-assembly. Proc. SPIE 11183, Advanced Laser Processing and Manufacturing III, 1118309. doi:10.1117/12.2539062
Abstract: Hierarchically porous structured materials with multifunctional properties and higher order complexities are highly desirable for many applications such as separation and energy storage. Here we describe the generation of hierarchically porous organic and inorganic structures coupling block copolymer self-assembly with spatially- and temporally controlled laser irradiation. A simple and rapid laser irradiation of block copolymer-directed hybrid films with a continuous wave laser in the sub-millisecond timescales enabled synthesis of 3D mesoporous polymer structures and shapes. Backfilling the polymer template with amorphous silicon followed by pulsed laser annealing enabled transient melt transformation of amorphous precursors into 3D mesoporous crystalline silicon nanostructures. Mechanistic studies on laser-induced crystalline silicon nanostructure formation during the nanosecond silicon melt-crystallization process and polymer template stability at temperatures above 1250 degrees Celsius are highlighted.
ISBN: 9781510630833
DOI: 10.1117/12.2539062
Rights: Copyright 2019 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MSE Conference Papers

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