Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/146467
Title: Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry
Authors: Upputuri, Paul Kumar
Rajendran, Praveenbalaji
Pramanik, Manojit
Keywords: Engineering::Bioengineering
Issue Date: 2020
Source: Upputuri, P. K., Rajendran, P., & Pramanik, M. (2020). Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry. Proceedings of SPIE 11249, Quantitative Phase Imaging VI, 112491I. doi:10.1117/12.2543917
Abstract: Interferometers are widely used in industry for surface profiling of microsystems. It can be used to inspect both smooth (reflective) and rough (scattering) surfaces in wide range of sizes. If the object surface is smooth, the interference between reference and object beam results in visible fringes. If the object surface is optically rough, the interference between reference and object beam results in speckles. Typical microsystems such as MEMS consist of both smooth and rough surfaces on a single platform. Recovering the surface profile of such samples with single-wavelength is not straight forward. In this paper, we will discuss a dual-wavelength approach to measure surface profile of both smooth and rough surfaces simultaneously. Interference fringe pattern generated on a combined surface is acquired at two different wavelengths. The wrapped phases at each wavelength are calculated and subtracted to generate contour phase map. This subtraction reveals the contour fringes of rough and smooth surfaces simultaneously. The dual-wavelength contour measurement procedure and experimental results will be presented.
URI: https://hdl.handle.net/10356/146467
ISBN: 9781510632615
DOI: 10.1117/12.2543917
Rights: Copyright 2020 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:SCBE Conference Papers

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