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Title: RGB speckle pattern interferometry for surface metrology
Authors: Upputuri, Paul Kumar
Rajendran, Praveenbalaji
Pramanik, Manojit
Keywords: Engineering::Bioengineering
Issue Date: 2020
Source: Upputuri, P. K., Rajendran, P., & Pramanik, M. (2020). RGB speckle pattern interferometry for surface metrology. Proceedings of SPIE - Quantitative Phase Imaging VI, 11249, 53-. doi:10.1117/12.2543916
Abstract: Digital speckle pattern interferometry (DSPI) has been widely used for surface metrology of optically rough surfaces. Single visible wavelength can provide high measurement accuracy, but it limits the deformation measurement range of the interferometer. Also, it is difficult to reveal the shape of a rough surface with one wavelength in normal illumination and observation geometry. Using more than one visible wavelength in DSPI, one can measure large deformations as well as shape using synthetic wavelength approach. In this work, we will discuss multi-wavelength speckle pattern interferometry using a Bayer RGB sensor. The colour sensor allows simultaneous acquisition of speckle patterns at different wavelengths. The colour images acquired using RGB sensor is split in to its individual components and corresponding interference phase map is recovered using error compensating phase shifting algorithm. The wrapped phase is unwrapped to quantify the deformation or shape information of the sample under inspection. Theoretical background of RGB interferometry for deformation and shape measurements, and experimental results will be presented.
ISBN: 9781510632615
DOI: 10.1117/12.2543916
Rights: Copyright 2020 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:SCBE Conference Papers

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