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Title: Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
Authors: Goh, Simon Chun Kiat
Shiau, Li Lynn
Zhang, Lin
Son, Bongkwon
Chen, Qimiao
Zhong, Jian
Salim, Teddy
Tan, Chuan Seng
Keywords: Engineering::Electrical and electronic engineering::Semiconductors
Issue Date: 2021
Source: Goh, S. C. K., Shiau, L. L., Zhang, L., Son, B., Chen, Q., Zhong, J., ... Tan, C. S. (2021). Monolithic Germanium-tin pedestal waveguide for mid-infrared applications. IEEE Photonics Journal, 13(2), 1-11. doi:10.1109/JPHOT.2021.3059452
Journal: IEEE Photonics Journal
Abstract: Germanium-tin (GeSn) is a CMOS-compatible group-IV material. Its growth, however, is plagued by the tendency of Sn segregation and the generation of defects within the GeSn layer when it is grown on the lattice-mismatched substrate. Thus far, thin GeSn has been reported for use in a direct-band gap for near-mid infrared light source and photodetector. In this communication, we report the growth of high quality single-crystalline GeSn (∼ 1 μm) with low compressive stress (−0.3%) and low defects (3 × 10 7 /cm 2 ) on Ge buffer on Si substrate. The as-grown GeSn is then fabricated into pedestal waveguide of width 1.25 μm. An estimated propagation loss of 1.81 dB/cm and bending loss of 0.19 dB/ bend are measured at 3.74 μm. In the absence of Ge-O absorption peaks at 820 and 550 cm −1 , under optimal fabrication and measurement condition, the proposed GeSn waveguide might possibly support light propagation for wavelength beyond 25 μm.
ISSN: 1943-0655
DOI: 10.1109/JPHOT.2021.3059452
Rights: © 2021 IEEE. This journal is 100% open access, which means that all content is freely available without charge to users or their institutions. All articles accepted after 12 June 2019 are published under a CC BY 4.0 license, and the author retains copyright. Users are allowed to read, download, copy, distribute, print, search, or link to the full texts of the articles, or use them for any other lawful purpose, as long as proper attribution is given.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles

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