Optimizing AAO template detachment and nanoimprinting of aluminium

Abstract

Conventional template-assisted nanofabrication relies on wet or dry etching techniques to reveal the nanowire beneath. In particular, the chemical template removal methods are less effective for aluminium substrates due to the metal’s high reactivity. Taking reference from lubricant-infused surfaces (LIS), the purpose of this study is to demonstrate a novel template detachment technique by infusing layers of lubricant into the anodic aluminium oxide (AAO) template. The report aims to discuss the role that lubrication plays in this experiment and to determine the effectiveness of the neoteric method. The ultrasonic embossing and lubricant application processes were optimized, while the relationship between lubricants of various kinematic viscosity indexes and nanowire growth was explored. The lubricant-aided technique enabled the fabrication of aluminium nanowires with lengths up to 10 μm.