Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/151193
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dc.contributor.authorTan, Chong Weien_US
dc.contributor.authorShakerzadeh, Maziaren_US
dc.contributor.authorTeo, Edwin Hang Tongen_US
dc.contributor.authorTay, Beng Kangen_US
dc.date.accessioned2021-08-31T08:43:59Z-
dc.date.available2021-08-31T08:43:59Z-
dc.date.issued2011-
dc.identifier.citationTan, C. W., Shakerzadeh, M., Teo, E. H. T. & Tay, B. K. (2011). Microstructure and through-film electrical characteristics of vertically aligned amorphous carbon films. Diamond and Related Materials, 20(3), 290-293. https://dx.doi.org/10.1016/j.diamond.2011.01.010en_US
dc.identifier.issn0925-9635en_US
dc.identifier.urihttps://hdl.handle.net/10356/151193-
dc.description.abstractThe microstructure and electrical properties of in-situ annealed carbon films is studied in this paper. In-situ annealing (150 °C to 600 °C) was done during the deposition of carbon films with −300 V substrate bias. Transmission electron microscopy and two points electrical probing studies were performed and the deduced transition for vertical orientated graphitic planes occurs at temperatures above 400 °C. The microstructure of the films strongly depends on the deposition temperature of the films (room temperature, 400 °C and 600 °C). Electrical conductivity of the film strongly depends on texturing due to the formation of preferred orientation in the vertical direction. The vertically orientated carbon (VOC) sheet provides effective nanochannels for electron transport, thus significantly improves the electrical properties of the annealed film.en_US
dc.description.sponsorshipMinistry of Education (MOE)en_US
dc.language.isoenen_US
dc.relationARC 13/08en_US
dc.relation.ispartofDiamond and Related Materialsen_US
dc.rights© 2011 Elsevier B.V. All rights reserved.en_US
dc.subjectEngineering::Electrical and electronic engineeringen_US
dc.titleMicrostructure and through-film electrical characteristics of vertically aligned amorphous carbon filmsen_US
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.identifier.doi10.1016/j.diamond.2011.01.010-
dc.identifier.scopus2-s2.0-79551572802-
dc.identifier.issue3en_US
dc.identifier.volume20en_US
dc.identifier.spage290en_US
dc.identifier.epage293en_US
dc.subject.keywordsAmorphous Carbonen_US
dc.subject.keywordsGraphiteen_US
dc.description.acknowledgementThe author would like to thank MoE Tier II funding ARC 13/08.en_US
item.grantfulltextnone-
item.fulltextNo Fulltext-
Appears in Collections:EEE Journal Articles

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