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Title: The effect of bonding structure of diamond like carbon (DLC) film with surface nickel coating upon laser annealing
Authors: Xu, Naiyun
Tsang, Siu Hon
Tan, Chong Wei
Teo, Hang Tong
Wang, Xincai
Tay, Beng Kang
Keywords: Engineering::Electrical and electronic engineering
Issue Date: 2013
Source: Xu, N., Tsang, S. H., Tan, C. W., Teo, H. T., Wang, X. & Tay, B. K. (2013). The effect of bonding structure of diamond like carbon (DLC) film with surface nickel coating upon laser annealing. Progress in Nanotechnology and Nanomaterials, 12(1), 35-39.
Journal: Progress in Nanotechnology and Nanomaterials
Abstract: Previous work has shown that the bonding structure and phase of amorphous carbon (a-C) can be modified by laser annealing. In this work, the effect of surface modification by metal coating on a-C during laser annealing was studied. A-C film was deposited by the filtered cathodic vacuum arc (FCVA) technique onto n-type (100) silicon substrate at room temperature. Nickel (Ni) was deposited on the surface of a-C films by electron beam (e-beam) evaporation method, and laser annealing with different laser energy density was performed on the a-C films with and without Ni coating. Visible Raman spectroscopy was used to examine the bonding structure evolution upon laser annealing and the effect on the bonding structure of a-C by introducing Ni onto the DLC film surface. The Raman spectra shows more pronounced change for a-C films with Ni coating than those without Ni coating upon laser annealing, and the Raman features also suggest that the Ni surface coating can enhance formation of the six-ring graphitic-like sp2 ordering. Electrical measurement shows a low resistive characteristic for both set of films due to laser induced conducting sp2 clusters formation.
ISSN: 2306-0034
Rights: © 2013 The Author(s) (published by World Academic Publishing). This is an open-access article distributed under the terms of the Creative Commons Attribution License.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles

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