The development of high performance polyvinylidene fluoride (PVDF) based piezoelectric polymers integrated on silicon substrate

Abstract

Ferroelectric materials have a wide range of applications in sensors, actuators and nonvolatile memory devices due to their excellent properties. A better understanding of the properties and physical phenomena in ferroelectric materials can help us further improve their performance in device applications. In this work, two PVDF-based polymers investigated were namely, the poly(vinylidene fluoride) homopolymer (PVDF) as well as the poly(vinylidene fluoride/trifluoroethylene) copolymer P(VDF-TrFE). PVDF homopolymer samples were fabricated using the spin-coating method and the P(VDF-TrFE) copolymer samples were prepared using the horizontal dipping Langmuir-Blodgett method.