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Title: Highly sensitive and integrated VOC sensor based on silicon nanophotonics
Authors: Li, Z. Y.
Zhang, G.
Yang, Z. C.
Hao, Y. L.
Jin, Y. F.
Liu, Ai Qun
Keywords: Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Issue Date: 2017
Source: Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F. & Liu, A. Q. (2017). Highly sensitive and integrated VOC sensor based on silicon nanophotonics. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 1479-1482.
Abstract: An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning.
ISBN: 9781538627310
DOI: 10.1109/TRANSDUCERS.2017.7994338
Rights: © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at:
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Conference Papers

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