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Title: Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting
Authors: Ge, Junyu
Ding, Bin
Hou, Shuai
Luo, Manlin
Nam, Donguk
Duan, Hongwei
Gao, Huajian
Lam, Yee Cheong
Li, Hong
Keywords: Engineering::Mechanical engineering::Prototyping
Issue Date: 2021
Source: Ge, J., Ding, B., Hou, S., Luo, M., Nam, D., Duan, H., Gao, H., Lam, Y. C. & Li, H. (2021). Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting. Nature Communications, 12, 3146-.
Project: RG101/18 (S) 
Journal: Nature Communications 
Abstract: Despite its advantages of scalable process and cost-effectiveness, nanoimprinting faces challenges with imprinting hard materials (e.g., crystalline metals) at low/room temperatures, and with fabricating complex nanostructures rapidly (e.g., heterojunctions of metal and oxide). Herein, we report a room temperature ultrasonic nanoimprinting technique (named nanojackhammer) to address these challenges. Nanojackhammer capitalizes on the concentration of ultrasonic energy flow at nanoscale to shape bulk materials into nanostructures. Working at room temperature, nanojackhammer allows rapid fabrication of complex multi-compositional nanostructures made of virtually all solid materials regardless of their ductility, hardness, reactivity and melting points. Atomistic simulations reveal a unique alternating dislocation generation and recovery mechanism that significantly reduces the imprinting force under ultrasonic cyclic loading. As a proof-of-concept, a metal-oxide-metal plasmonic nanostructure with built-in nanogap is rapidly fabricated and employed for biosensing. As a fast, scalable, and cost-effective nanotechnology, nanojackhammer will enable various unique applications of complex nanostructures in optoelectronics, biosensing, catalysis and beyond.
ISSN: 2041-1723
DOI: 10.1038/s41467-021-23427-y
Schools: School of Mechanical and Aerospace Engineering 
School of Electrical and Electronic Engineering 
School of Chemical and Biomedical Engineering 
Organisations: Institute of High Performance Computing, A*STAR
Research Centres: CNRS International NTU THALES Research Alliances 
Rights: © 2021 The Author(s). This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit licenses/by/4.0/.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles
MAE Journal Articles
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