Carbon based materials for MEMS applications

Abstract

CNTs have been a subject of interest by many researchers since its discovery by Ijima in 1991. With its excellent electrical and mechanical properties, many researchers have exploited its advantageous electrical properties for use in integrated circuits interconnects and field emission devices. However, very few researchers have explored its extraordinary mechanical properties. With its high elastic modulus and high buck resistance, CNTs would make very good structural materials.

Many researchers have been trying to control the density of the CNTs growth by using sophisticated and expensive techniques such as electron beam lithography and ion beam bombardment. Density control of CNTs has been demonstrated by a cheap novel combination of steps consisting of annealing, etching and ultraviolet overexposure. Sub-micron sized single CNT has been successfully demonstrated using the above-mentioned technique.

Two different and completely new methods of utilizing CNTs are being introduced, namely as templates and damping. It has been demonstrated that materials can be deposited and encapsulate the CNTs pillars. The ‘nanoballs’ effect of top layer material on CNTs has also been explained. Successful coverage on single CNT has been demonstrated. The possibility of using DLC-CNTs hybrid material has been successfully shown.