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dc.contributor.authorLi, Nanxien_US
dc.contributor.authorYuan, Hongyeen_US
dc.contributor.authorXu, Linfangen_US
dc.contributor.authorZeng, Yongquanen_US
dc.contributor.authorQiang, Boen_US
dc.contributor.authorWang, Qi Jieen_US
dc.contributor.authorZheng, Shaonanen_US
dc.contributor.authorCai, Hongen_US
dc.contributor.authorLee, Lennon Yao Tingen_US
dc.contributor.authorSingh, Navaben_US
dc.contributor.authorZhao, Danen_US
dc.identifier.citationLi, N., Yuan, H., Xu, L., Zeng, Y., Qiang, B., Wang, Q. J., Zheng, S., Cai, H., Lee, L. Y. T., Singh, N. & Zhao, D. (2021). Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing. Optics Express, 29(12), 19084-19093.
dc.description.abstractInfrared gas sensors hold great promise in the internet of things and artificial intelligence. Making infrared light sources with miniaturized size, reliable and tunable emission is essential but remains challenging. Herein, we present the tailorability of radiant power and the emergence of new emission wavelength of microelectromechanical system (MEMS)-based thermal emitters with nickel oxide (NiO) films. The coating of NiO on emitters increases top surface emissivity and induces the appearance of new wavelengths between 15 and 19 µm, all of which have been justified by spectroscopic methods. Furthermore, a sensor array is assembled for simultaneous monitoring of concentrations of carbon dioxide (CO2), methane (CH4), humidity, and temperature. The platform shows selective and sensitive detection at room temperature toward CO2 and CH4 with detection limits of around 50 and 1750 ppm, respectively, and also shows fast response/recovery and good recyclability. The demonstrated emission tailorability of MEMS emitters and their usage in sensor array provide novel insights for designing and fabricating optical sensors with good performance, which is promising for mass production and commercialization.en_US
dc.description.sponsorshipAgency for Science, Technology and Research (A*STAR)en_US
dc.description.sponsorshipNational Research Foundation (NRF)en_US
dc.relationIAF-PP A1789a0024en_US
dc.relation.ispartofOptics Expressen_US
dc.rights© 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for noncommercial purposes and appropriate attribution is maintained. All other rights are reserved.en_US
dc.subjectEngineering::Electrical and electronic engineering::Optics, optoelectronics, photonicsen_US
dc.titleTailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensingen_US
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.description.versionPublished versionen_US
dc.subject.keywordsEmission Wavelengthen_US
dc.subject.keywordsInfrared Gas Sensorsen_US
dc.description.acknowledgementAgency for Science, Technology and Research (IAF-PP A1789a0024); National Research Foundation Singapore (NRF-CRP18-2017-02).en_US
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