Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/156315
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dc.contributor.authorThong, Claudia Xinyien_US
dc.date.accessioned2022-04-13T12:57:11Z-
dc.date.available2022-04-13T12:57:11Z-
dc.date.issued2022-
dc.identifier.citationThong, C. X. (2022). Atomic layer deposition of noble metal thin films. Final Year Project (FYP), Nanyang Technological University, Singapore. https://hdl.handle.net/10356/156315en_US
dc.identifier.urihttps://hdl.handle.net/10356/156315-
dc.description.abstractNoble metals are popular metals used in many applications, especially in catalysis. Such catalyst are needed in industries where high efficiency is required. Transition metals especially are great for this use. Among transition metals, another class of metals called noble metals showcase remarkable chemical attack resistance, even so at elevated temperatures. To further improve the properties of these noble metals, a high entropy alloy (HEA) can be made out of platinum (Pt), iridium (Ir), palladium (Pd), rhodium (Rh) and ruthenium (Ru) so that their shared properties can be further enhanced and can ultimately be more beneficial in the usage in catalysts. Before this HEA can be made, the first step in forming the five or more metal alloy have to be done, and this can be made using atomic layer deposition (ALD) to deposit the individual layers. Results were collected using X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) and the individual thin films were successfully deposited in the sequence PtIrPdRhRu.en_US
dc.language.isoenen_US
dc.publisherNanyang Technological Universityen_US
dc.relationMSE/21/099en_US
dc.subjectEngineering::Materialsen_US
dc.titleAtomic layer deposition of noble metal thin filmsen_US
dc.typeFinal Year Project (FYP)en_US
dc.contributor.supervisorAlfred Tok Iing Yoongen_US
dc.contributor.schoolSchool of Materials Science and Engineeringen_US
dc.description.degreeBachelor of Engineering (Materials Engineering)en_US
dc.contributor.supervisor2Zou Yimingen_US
dc.contributor.supervisoremailMIYTok@ntu.edu.sgen_US
item.grantfulltextembargo_restricted_20230509-
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Appears in Collections:MSE Student Reports (FYP/IA/PA/PI)
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