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Title: Practical reviews of exhaust systems operation in semiconductor industry
Authors: Li, Yuanzhe
Zhu, Yalin
Hao, Yu
Xiao, Peng
Dong, Zhili
Li, Xiang
Keywords: Engineering::Materials
Issue Date: 2021
Source: Li, Y., Zhu, Y., Hao, Y., Xiao, P., Dong, Z. & Li, X. (2021). Practical reviews of exhaust systems operation in semiconductor industry. 2nd Asia Conference on Geological Research and Environmental Technology (GRET 2021), 859, 012074-.
Project: 122018- T1-001-077 
metadata.dc.contributor.conference: 2nd Asia Conference on Geological Research and Environmental Technology (GRET 2021)
Abstract: Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same time in the semiconductor process, many conditions will occur in the operation of the scrubber tower and the processing efficiency will be reduced. This paper aims at the common problems such as growth of bacteria, unstable pH, white smoke, and inaccurate monitoring of exhaust gas flow rate. Based on the investigation, all the analysis, results and solutions are provided as practical reference for other semiconductor companies.
DOI: 10.1088/1755-1315/859/1/012074
Schools: School of Materials Science and Engineering 
Rights: © 2021 The Author(s). Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Published under licence by IOP Publishing Ltd.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MSE Conference Papers

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