Practical reviews of exhaust systems operation in semiconductor industry

Abstract

Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same time in the semiconductor process, many conditions will occur in the operation of the scrubber tower and the processing efficiency will be reduced. This paper aims at the common problems such as growth of bacteria, unstable pH, white smoke, and inaccurate monitoring of exhaust gas flow rate. Based on the investigation, all the analysis, results and solutions are provided as practical reference for other semiconductor companies.