Development of 3D microscope for surface texture measurement

Abstract

As technology advances, surface inspection has started playing significant roles in various industries. Some industries require the visualization of whole surfaces, regardless of roughness. Irregularities and surface features are equally important aspects of surface profiles. Therefore, these features need to be easily visualized and identified when scanning a surface.

A non-contact 3D surface inspection system is proposed by integrating a chromatic confocal sensor with a 3-axis linear motorized stage using C++. Chromatic confocal sensors can obtain data with high degrees of accuracy combined with a fast measuring speed. Its non-contact nature is also an advantage over other methods. It is also versatile and can measure reflective or transparent material, without the need for lateral measurements due to the sensor operating on the principle of chromatic aberration.

Various non-contact measurement techniques as well as the importance of surface inspection in various industries are also discussed in the report. Experiments and data analysis were conducted to validate the new inspection system's measurement capability, feasibility, and accuracy. The result demonstrates the capability of the new inspection system and how its data can be used to identify surface features.