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Title: Challenges and opportunities of chemiresistors based on microelectromechanical systems for chemical olfaction
Authors: Guo, Mengya
Brewster II, James T.
Zhang, Huacheng
Zhao, Yuxin
Zhao, Yanli
Keywords: Science::Chemistry
Issue Date: 2022
Source: Guo, M., Brewster II, J. T., Zhang, H., Zhao, Y. & Zhao, Y. (2022). Challenges and opportunities of chemiresistors based on microelectromechanical systems for chemical olfaction. ACS Nano, 16(11), 17778-17801.
Project: M21K2c0105 
Journal: ACS Nano 
Abstract: Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.
ISSN: 1936-0851
DOI: 10.1021/acsnano.2c08650
Schools: School of Chemistry, Chemical Engineering and Biotechnology 
Rights: This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Nano, copyright © 2022 American Chemical Society, after peer review and technical editing by the publisher. To access the final edited and published work see
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:CCEB Journal Articles

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