Towards optimising nanofabrication process of spintronic devices

Abstract

The Nanyang Technological University (NTU) spin lab has recently brought in two instruments that are used in the nanofabrication process of spin devices – ATC 2200 Sputter System and NanoFrazor Thermal Scanning Probe Lithography. The NanoFrazor Thermal Scanning Probe Lithography has similar functions to the Atomic Force Microscopy, with the added ability to perform patterning on samples. When using the NanoFrazor to scan the topography of samples, many flaws were noted. More work needs to be done to explore the NanoFrazor and optimise its processing capabilities. Therefore, the main method used to analyse the topography of samples is using the Atomic Force Microscopy. The ATC 2200 Sputter System has 11 targets of various compounds which needed to be calibrated. The deposition of these individual targets was tested for their accuracy and reproducibility via the Atomic Force Microscopy. Positive results obtained from this process move forward with the fabrication of multilayer stacks. Therefore, with the presence of these new instruments, the spin lab hopes to expand its research by creating more multilayer stacks with various properties and exploring their characteristics and functionality.