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Title: Digital Lensless microscope : MEMS application
Authors: Ma Myat, Thu Zar
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Issue Date: 2009
Abstract: Recent advancements in micro and nanofabrication initiated the increasing sophisticated of measurements and characterization at nanometer scale. Various kinds of measurement systems such as atomic force microscopy, scanning probe microscopy, electron microscopy are developed to characterize the materials and devices at ever increasing magnification. The optical measurements system has also advanced beyond simple optical microscopy. Techniques such as holography and digital holography were developed to characterize the micro and nano-scale devices. The ability to extract the three dimensional information from the hologram provides a great opportunity to develop a more advanced characterization tool for many micro and nano-scale optical metrology. Application of measurement system includes microsystem, MEMS, microelectronics, biology.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Student Reports (FYP/IA/PA/PI)

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