Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/19343
Title: Fabrication and characterization of low-temperature poly-si TFTs for AMLCD
Authors: Ong, Gim Chye
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2001
Abstract: The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications.
URI: http://hdl.handle.net/10356/19343
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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