Please use this identifier to cite or link to this item:
Title: Fabrication and characterization of low-temperature poly-si TFTs for AMLCD
Authors: Ong, Gim Chye
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2001
Abstract: The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications.
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

Files in This Item:
File Description SizeFormat 
  Restricted Access
2.47 MBAdobe PDFView/Open

Page view(s) 50

Updated on Nov 26, 2020

Download(s) 20

Updated on Nov 26, 2020

Google ScholarTM


Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.