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Title: Development of diamond-like carbon films by ECR-CVD
Authors: Yang, Hong
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 1998
Abstract: Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanical hardness have been successfully applied in various fields such as optical, wear and corrosion resistant coatings.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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