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|Title:||Development of diamond-like carbon films by ECR-CVD||Authors:||Yang, Hong||Keywords:||DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials||Issue Date:||1998||Abstract:||Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanical hardness have been successfully applied in various fields such as optical, wear and corrosion resistant coatings.||URI:||http://hdl.handle.net/10356/19582||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||EEE Theses|
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