Morphological study of (100) textured and epitaxially textured diamond thin films

Abstract

(100) textured diamond film and (100) epitaxially textured diamond films are one of the most interesting areas of current CVD diamond research. These films possess better crystal quality than other CVD diamond film, such as (110) textured, (111) textured and randomly oriented polycrystalline diamond films. They have a smoother surface than other types of CVD diamond film even at film thickness of a few hundred microns. Therefore, they might fiilfiU the requirements for CVD diamond to be applied in IR optics and even in the visible light range. Further, recent research has demonstrated considerable improvements in electronic properties in doped (100) epitaxially textured diamond film in comparison to other types of polycrystalline diamond film. However, fiorther study is needed to have a better understanding of the mechanisms of textured growth and epitaxially textured growth and also to refme the growth technique.