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Title: Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
Authors: Swaminathan, S.
Yoon, Soon Fatt.
Zhu, Weiguang.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2000
Abstract: Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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