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Title: Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
Authors: Zhang, Qing
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 2000
Abstract: The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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