Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/2735
Title: Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
Authors: Zhang, Qing
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 2000
Abstract: The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD.
URI: http://hdl.handle.net/10356/2735
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

Files in This Item:
File Description SizeFormat 
EEE-RESEARCH-REPORT_149.pdf
  Restricted Access
968.2 kBAdobe PDFView/Open

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.