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https://hdl.handle.net/10356/2735| Title: | Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy | Authors: | Zhang, Qing | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials | Issue Date: | 2000 | Abstract: | The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD. | URI: | http://hdl.handle.net/10356/2735 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Research Reports (Staff & Graduate Students) |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-RESEARCH-REPORT_149.pdf Restricted Access | 968.2 kB | Adobe PDF | View/Open |
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