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Title: Studies on diamond and diamond-like carbon films
Authors: Tan, Hong Siang
Tay, Beng Kang
Shi, Xu
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 2001
Abstract: In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar are compared.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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