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https://hdl.handle.net/10356/2775
Title: | Studies on diamond and diamond-like carbon films | Authors: | Tan, Hong Siang Tay, Beng Kang Shi, Xu |
Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials | Issue Date: | 2001 | Abstract: | In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar are compared. | URI: | http://hdl.handle.net/10356/2775 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Research Reports (Staff & Graduate Students) |
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File | Description | Size | Format | |
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EEE-RESEARCH-REPORT_185.pdf Restricted Access | 1.15 MB | Adobe PDF | View/Open |
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