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Title: Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
Authors: Yoon, Soon Fatt.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 2001
Abstract: In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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