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Title: Development of the lithographic sources and processes for device fabrication
Authors: Wong, Terence Kin Shun
Lee, Sing
Xu, Shuyan
Lee, Paul Choon Keat
Tan, Augustine Tuck Lee
Rawat, Rajdeep Singh
Liu, Mahe
Ostrikov, Kostyantyn
Vladimir Koudriachov
Li, Yin An
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Issue Date: 2002
Abstract: The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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