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Title: Characterization of amorphous silicon carbide thin films for display applications
Authors: Ahn, Jaeshin
Yoon, Soon Fatt
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2002
Abstract: The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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