Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/2817| Title: | Characterization of amorphous silicon carbide thin films for display applications | Authors: | Ahn, Jaeshin Yoon, Soon Fatt |
Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
Issue Date: | 2002 | Abstract: | The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application. | URI: | http://hdl.handle.net/10356/2817 | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Research Reports (Staff & Graduate Students) |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-RESEARCH-REPORT_222.pdf Restricted Access | 649.92 kB | Adobe PDF | View/Open |
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