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Title: Fabrication and characterisation of microelectronics materials and devices
Authors: Lam, Yee Loy
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 1999
Abstract: To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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