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Title: Plasma radiation sources for X-ray lithography and neutron analysis applications
Authors: Lee, Sing
Wong, Terence Kin Shun
Feng, Xianping
Lee, Paul Choon Keat
Springham, Stuart V.
Serban, Adrian
Liu, Mahe
Kudryashov, Vladimir
Gribkov, Vladimir A.
Rajdeep Singh Rawat
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 1999
Abstract: The main aim of this project was to develop soft x-ray point sources of sufficient power for application in SXR microelectronics lithography. The stated objective was to deliver l00-200W of SXR power, averaged over several minutes of burst duration, from a point source into 47~. The source was to be based on a plasma focus. The second aim of this project was to carry out a feasibility study of the use of plasma fusion neutrons for activation analysis applications.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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