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|Title:||Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology||Authors:||Zhu, Weiguang||Keywords:||DRNTU::Engineering::Electrical and electronic engineering::Semiconductors||Issue Date:||1998||Abstract:||In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique.||URI:||http://hdl.handle.net/10356/3037||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||EEE Research Reports (Staff & Graduate Students)|
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