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Title: Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
Authors: Zhu, Weiguang
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Issue Date: 1998
Abstract: In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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